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905 3D-CAD files, prices and delivery time ➤ www.igus.com/drylin Cleanroom and ESD compatibility Cleanroom suitability and ESD compability of DryLin ® All DryLin ® guide systems are clearly qualified for clean room applications. The di…erentiation between the various clean room classes is only dependent on load and speed of the application. The combination of iglide ® J and hard anodized aluminum is classified as level 1 in the ESD compatibility according to SEMI E78-0998 (Highest rank). The following DryLin ® guides from igus ® were tested: N40, W10, T25 and T30. See below for detailed results. Linear guide system DryLin ® TK-10-30-01 "For the linear guide system DryLin ® TK-10-30-01 by igus ® GmbH, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2 ¯m, 0.3 ¯m, 0.5 ¯m, and 5 ¯m with motion speed of v = 0.1 m/s, to clearly derive suitability for clean rooms classified as ISO Class 3 according to DIN EN ISO 14644-1." Linear guide system DryLin ® NK-02-40-02 "For the linear guide system DryLin ® NK-02-40-02 by igus ® GmbH, it is possible, on the calculations of the likelihood of violation of thresh- old values of the detection sizes 0.2 ¯m, 0.3 ¯m, 0.5 ¯m, and 5 ¯m with motion speed of v =1 m/s, to clearly derive suitability for clean rooms classified as ISO Class 6 according to DIN EN ISO 14644-1." The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system DryLin ® NK-02- DryLin ® linear guides by igus ® 40-02 can be classified as "level 1" (Highest rank). See Fraunhofer IPA Report No.: IG 0308-295 73. Linear guide system DryLin ® TK-01-25-02 "For the linear guide system DryLin ® TK-01-25-02 by igus ® GmbH, it is pos- sible, on the calculations of the likeli- hood of violation of threshold values of the detection sizes 0.2 ¯m, 0.3 ¯m, 0.5 ¯m, and 5 ¯m with motion speed of v =1 m/s, to clearly derive suitability for clean rooms classified as ISO Class 5 according to DIN EN ISO 14644-1." The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system DryLin ® TK-01- 25-02 can be classified as "level 1" (Highest rank). Linear guide system DryLin ® WK-10-40-15-01 "For the linear guide system DryLin ® WK-10-40-15-01 by igus ® GmbH, it is possible, on the calculations of the likelihood of vio- lation of threshold values of the detection sizes 0.2 ¯m, 0.3 ¯m, 0.5 ¯m, and 5 ¯m with motion speed of v =1 m/s, to clearly derive suitability for clean rooms classified as ISO Class 6 according to DIN EN ISO 14644-1." The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system DryLin ® WK-10- 40-15-01 can be classified as "level 1" (Highest rank). See Fraunhofer IPA Report No.: IG 0308-295 74.

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